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Zinkoxoclusters voor extreme ultravioletlithografie
Scheikunde
Mw. N. Thakur promoveert op het proefschrift: 'Zinc Oxoclusters for Extreme Ultraviolet Lithography'. Promotor is prof. dr. A.M. Brouwer. Copromotor is dr. S. Castellanos Ortega.
Kerngegevens van evenement
Zinkoxoclusters voor extreme ultravioletlithografie
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